Series 2000
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The Series 2000 consists of a single chassis supporting up to nine (9) mass flow controllers, a serpentine pre-mix zone and a zero dead-space final mixing zone. Gas wetted surfaces are electro-polished 316 stainless steel. Seals are gas-compatible elastomer. User interface includes a backlit 80 character by 25 line liquid-crystal display and membrane keypad.
The instrument's mass flow controllers are factory calibrated using a primary flow standard traceable to the United States National Institute of Standards and Technology (NIST). The calibration data consists of an eleven-point comparison of commanded versus actual flow with linear interpolation between the points.
The Series 2000 is available in either a standard rack mount or bench top configuration. The optional RS-232 serial data interface permits remote or computer operation of the instrument
Data Sheet Series 2000