The ALOHA H2O series provides High Brightness LED (HB-LED) manufacturers with the lowest limits of detection available for real-time moisture analysis in high purity ammonia (NH3) process gas. Using powerful Cavity Ring-Down Spectroscopy, the ALOHA H2O and ALOHA+ H2O detect moisture at lower levels and with less operational costs than conventional technologies, and ensure that gas manufacturers and ammonia purifiers are delivering high-purity ammonia to LED deposition tools.
Lower Detection Limits (LDL):
ALOHA H2O analyzer: 10 ppb H2O in NH3
ALOHA+ H2O analyzer: 2 ppb H2O in NH3